Title | Hybrid tunnel junction enabled independent junction control of cascaded InGaN blue/green micro-light-emitting diodes |
Publication Type | Journal Article |
Year of Publication | 2023 |
Authors | Li, P., H. Li, Y. Yao, K. Shek Qwah, M. Iza, J. S. Speck, S. Nakamura, and S. P. DenBaars |
Journal | Opt. Express |
Volume | 31 |
Pagination | 7572–7578 |
Date Published | Feb |
Keywords | Atomic layer deposition, Diode lasers, Indium tin oxide, Light extraction, Quantum efficiency, Vertical cavity surface emitting lasers |
Abstract | We demonstrate vertical integration of nitride-based blue/green micro-light-emitting diodes (&\#x00B5;LEDs) stacks with independent junctions control using hybrid tunnel junction (TJ). The hybrid TJ was gown by metal organic chemical vapor deposition (p&\#x2009;&\#x002B;&\#x2009;GaN) and molecular-beam epitaxy (n&\#x2009;&\#x002B;&\#x2009;GaN). Uniform blue, green and blue/green emission can be generated from different junction diodes. The peak external quantum efficiency (EQE) of the TJ blue &\#x00B5;LEDs and green &\#x00B5;LEDs with indium tin oxide contact is 30&\#x0025; and 12&\#x0025;, respectively. The carrier transportation between different junction diodes was discussed. This work suggests a promising approach for vertical &\#x00B5;LEDs integration to enhance the output power of single LEDs chip and monolithic &\#x00B5;LEDs with different emission colors with independent junction control. |
URL | https://opg.optica.org/oe/abstract.cfm?URI=oe-31-5-7572 |
DOI | 10.1364/OE.480393 |