Epitaxial growth of β-Ga2O3 on (110) substrate by plasma-assisted molecular beam epitaxy

TitleEpitaxial growth of β-Ga2O3 on (110) substrate by plasma-assisted molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2020
AuthorsItoh, T., A. Mauze, Y. Zhang, and J. S. Speck
JournalApplied Physics Letters
Volume117
Pagination152105
URLhttps://doi.org/10.1063/5.0027884
DOI10.1063/5.0027884