Metalorganic chemical vapor deposition grown n-InGaN/n-GaN tunnel junctions for micro-light-emitting diodes with very low forward voltage

TitleMetalorganic chemical vapor deposition grown n-InGaN/n-GaN tunnel junctions for micro-light-emitting diodes with very low forward voltage
Publication TypeJournal Article
Year of Publication2020
AuthorsLi, P., H. Zhang, H. Li, Y. Zhang, Y. Yao, N. Palmquist, M. Iza, J. S. Speck, S. Nakamura, and S. P. DenBaars
JournalSemiconductor Science and Technology
Volume35
Pagination125023
Date Publishedoct
Abstract

High performance GaN-based micro-light-emitting diodes (µLEDs) with epitaxial n-InGaN/n-GaN tunnel junctions (InGaN TJs) were grown by metalorganic chemical vapor deposition (MOCVD). The InGaN TJs µLEDs show a significant reduction of forward voltage (Vf) by ∼0.6 V compared to the common TJs µLEDs. The Vf at 20 A cm−2 is very low varied from 3.15 V to 3.19 V in small InGaN TJ µLEDs with a size less than 40 × 40 µm2, and then significantly increases in large LEDs. Selective area growth (SAG) of TJs can overcome such size limitation by vertical out diffusion of hydrogen through the apertures on top of p-GaN. The InGaN TJ µLEDs overgrown by SAG show a size-independent low Vf ranged from 3.08 V to 3.25 V. The external quantum efficiency (EQE) of the packaged TJ µLEDs was improved by 6% compared to the common µLEDs with indium tin oxide (ITO) contact. This work solves the key challenges of MOCVD-grown TJs.

URLhttps://doi.org/10.1088/1361-6641/abbd5b
DOI10.1088/1361-6641/abbd5b