Metalorganic chemical vapor deposition-grown tunnel junctions for low forward voltage InGaN light-emitting diodes: epitaxy optimization and light extraction simulation

TitleMetalorganic chemical vapor deposition-grown tunnel junctions for low forward voltage InGaN light-emitting diodes: epitaxy optimization and light extraction simulation
Publication TypeJournal Article
Year of Publication2021
AuthorsLi, P., H. Li, H. Zhang, M. Iza, J. S. Speck, S. Nakamura, and S. P. DenBaars
JournalSemiconductor Science and Technology
Volume36
Pagination035019
Date Published02/2021
Abstract

In this work, we demonstrate the detailed optimization of metalorganic chemical vapor deposition (MOCVD)-grown tunnel junctions (TJs) utilizing selective area growth (SAG) for regular size (0.1 mm2) and micro-size InGaN light-emitting diodes (LEDs and µLEDs). Finite-difference time-domain simulations show that the SAG apertures result in a more directional light emission of far-field radiation pattern for the SAG TJ LEDs grown on patterned sapphire substrate. Moreover, it is noted that the n-InGaN insertion layer and Si-doped concentration in the n+GaN TJs layer is essential to realize a low forward voltage (V f) in TJs LEDs. For both 0.1 mm2 LEDs and µLEDs, the V f is independent on the SAG aperture space varied from 3 to 8 µm when the Si-doping level in the n+GaN layer is as high as 1.7 × 1020 cm−3. The optimized TJ LEDs exhibit a comparable differential resistance of 1.0 × 10−2 Ω cm2 at 100 A cm−2 and a very small voltage penalty of 0.2–0.3 V compared to the conventional indium tin oxide contact LEDs. The low V f penalty is caused by a higher turn on voltage, which is the smallest one among the MOCVD-grown TJs LEDs and comparable to the best molecular beam epitaxy-grown TJs LEDs.

URLhttps://doi.org/10.1088/1361-6641/abe0f7
DOI10.1088/1361-6641/abe0f7