H2O vapor assisted growth of β-Ga2O3 by MOCVD

TitleH2O vapor assisted growth of β-Ga2O3 by MOCVD
Publication TypeJournal Article
Year of Publication2020
AuthorsAlema, F., Y. Zhang, A. Mauze, T. Itoh, J. S. Speck, B. Hertog, and A. Osinsky
JournalAIP Advances
Volume10
Pagination085002
URLhttps://doi.org/10.1063/5.0011910
DOI10.1063/5.0011910