Metal oxide catalyzed epitaxy (MOCATAXY) of β-Ga2O3 films in various orientations grown by plasma-assisted molecular beam epitaxy

TitleMetal oxide catalyzed epitaxy (MOCATAXY) of β-Ga2O3 films in various orientations grown by plasma-assisted molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2020
AuthorsMauze, A., Y. Zhang, T. Itoh, F. Wu, and J. S. Speck
JournalAPL Materials
Volume8
Pagination021104
URLhttps://doi.org/10.1063/1.5135930
DOI10.1063/1.5135930