Title | Metal oxide catalyzed epitaxy (MOCATAXY) of β-Ga2O3 films in various orientations grown by plasma-assisted molecular beam epitaxy |
Publication Type | Journal Article |
Year of Publication | 2020 |
Authors | Mauze, A., Y. Zhang, T. Itoh, F. Wu, and J. S. Speck |
Journal | APL Materials |
Volume | 8 |
Pagination | 021104 |
URL | https://doi.org/10.1063/1.5135930 |
DOI | 10.1063/1.5135930 |