| Title | N2O grown high Al composition nitrogen doped Beta-(AlGa)2O3/Beta-Ga2O3 using MOCVD |
| Publication Type | Journal Article |
| Year of Publication | 2023 |
| Authors | Alema, F., T. Itoh, W. Brand, M. Tadjer, A. Osinsky, and J. S. Speck |
| Journal | Journal of Vacuum Science and Technology A |
| Volume | 41 |
| Issue | 4 |