Controllable nitrogen doping of MOCVD Ga2O3 using NH3

TitleControllable nitrogen doping of MOCVD Ga2O3 using NH3
Publication TypeJournal Article
Year of Publication2023
AuthorsAlema, F., T. Itoh, W. Brand, A. Osinsky, and J. S. Speck
JournalApplied Physics Letters
Volume122
Start Page252105