Title | β-Ga2O3 epitaxy and power devices from metal-organic chemical vapor deposition |
Publication Type | Conference Paper |
Year of Publication | 2022 |
Authors | Farzana, E., F. Alema, T. Itoh, N. Hendricks, A. Mauze, A. Osinsky, and J. Speck |
Editor | Rogers, D. J., and F. H. Teherani |
Conference Name | Oxide-based Materials and Devices XIII |
Publisher | International Society for Optics and Photonics |
Keywords | Breakdown, Field Plate, Ga2O3, MOCVD, On-resistance, Power Device, Pseudo vertical diode, Vertical Schottky Diode |
URL | https://doi.org/10.1117/12.2617832 |
DOI | 10.1117/12.2617832 |