β-Ga2O3 epitaxy and power devices from metal-organic chemical vapor deposition

Titleβ-Ga2O3 epitaxy and power devices from metal-organic chemical vapor deposition
Publication TypeConference Paper
Year of Publication2022
AuthorsFarzana, E., F. Alema, T. Itoh, N. Hendricks, A. Mauze, A. Osinsky, and J. Speck
EditorRogers, D. J., and F. H. Teherani
Conference NameOxide-based Materials and Devices XIII
PublisherInternational Society for Optics and Photonics
KeywordsBreakdown, Field Plate, Ga2O3, MOCVD, On-resistance, Power Device, Pseudo vertical diode, Vertical Schottky Diode
URLhttps://doi.org/10.1117/12.2617832
DOI10.1117/12.2617832