Title | Highly conductive epitaxial β-Ga2O3 and β-(AlxGa1−x)2O3 films by MOCVD |
Publication Type | Journal Article |
Year of Publication | 2022 |
Authors | Alema, F., T. Itoh, S. Vogt, J. S. Speck, and A. Osinsky |
Journal | Japanese Journal of Applied Physics |
Volume | 61 |
Pagination | 100903 |
Date Published | sep |
Abstract | We report on the epitaxial growth of highly conductive degenerated Ge or Si doped β-Ga2O3 and β-(Al x Ga1−x )2O3 films by MOCVD. Highly conductive homoepitaxial β-Ga2O3 layers with record conductivities of 2523 and 1581 S cm−1 were realized using Si and Ge dopants. Highly conductive Si doped β-(Al x Ga1−x )2O3 films were also grown. The incorporation of Si decreased with the increase in Al content and layer thickness. Record high conductivity of 612 S cm−1 was attained for coherently strained β-(Al0.12Ga0.88)2O3. |
URL | https://dx.doi.org/10.35848/1347-4065/ac8bbc |
DOI | 10.35848/1347-4065/ac8bbc |