Title | Coherently strained (001) β-(AlxGa1−x)2O3 thin films on β-Ga2O3: Growth and compositional analysis |
Publication Type | Journal Article |
Year of Publication | 2022 |
Authors | Mauze, A., T. Itoh, Y. Zhang, E. Deagueros, F. Wu, and J. S. Speck |
Journal | Journal of Applied Physics |
Volume | 132 |
Date Published | 09 |
ISSN | 0021-8979 |
Abstract | In this work, we report on the growth of (001) β-(AlxGa1−x)2O3 films in molecular beam epitaxy via metal oxide-catalyzed epitaxy. Films with Al contents up to 15\% were grown and the Al content was measured with atom probe tomography. A relationship between the Al content and the out-of-plane lattice parameter was derived for both (001) and (100) orientations. Transmission electron microscopy showed no evidence of extended defects in (001) β-(AlxGa1−x)2O3, and reciprocal space maps confirmed that β-(AlxGa1−x)2O3 films were coherently strained to (001) β-Ga2O3. Sn was also demonstrated to act as a surfactant for (001) β-(AlxGa1−x)2O3 growth, allowing for high-quality, uniform films with smooth morphologies. |
URL | https://doi.org/10.1063/5.0104010 |
DOI | 10.1063/5.0104010 |