Coherently strained (001) β-(AlxGa1−x)2O3 thin films on β-Ga2O3: Growth and compositional analysis

TitleCoherently strained (001) β-(AlxGa1−x)2O3 thin films on β-Ga2O3: Growth and compositional analysis
Publication TypeJournal Article
Year of Publication2022
AuthorsMauze, A., T. Itoh, Y. Zhang, E. Deagueros, F. Wu, and J. S. Speck
JournalJournal of Applied Physics
Volume132
Date Published09
ISSN0021-8979
Abstract

In this work, we report on the growth of (001) β-(AlxGa1−x)2O3 films in molecular beam epitaxy via metal oxide-catalyzed epitaxy. Films with Al contents up to 15\% were grown and the Al content was measured with atom probe tomography. A relationship between the Al content and the out-of-plane lattice parameter was derived for both (001) and (100) orientations. Transmission electron microscopy showed no evidence of extended defects in (001) β-(AlxGa1−x)2O3, and reciprocal space maps confirmed that β-(AlxGa1−x)2O3 films were coherently strained to (001) β-Ga2O3. Sn was also demonstrated to act as a surfactant for (001) β-(AlxGa1−x)2O3 growth, allowing for high-quality, uniform films with smooth morphologies.

URLhttps://doi.org/10.1063/5.0104010
DOI10.1063/5.0104010