Title | Narrow ridge III-nitride m-plane violet edge-emitting laser diodes with sidewall passivation using atomic layer deposition |
Publication Type | Conference Paper |
Year of Publication | 2023 |
Authors | Wong, M. S., H. Zhang, E. S. Trageser, R. M. Anderson, J. S. Speck, S. Nakamura, and S. P. DenBaars |
Editor | Fujioka, H., H. Morkoç, and U. T. Schwarz |
Conference Name | Gallium Nitride Materials and Devices XVIII |
Publisher | International Society for Optics and Photonics |
Keywords | ALD passivation, etching through active region, narrow ridge lasers |
URL | https://doi.org/10.1117/12.2646155 |
DOI | 10.1117/12.2646155 |