| Title | High efficiency of III-nitride and AlGaInP micro-light-emitting diodes using atomic layer deposition |
| Publication Type | Conference Paper |
| Year of Publication | 2021 |
| Authors | Wong, M. S., J. S. Speck, S. Nakamura, and S. P. DenBaars |
| Editor | Kim, J. Kyu, M. R. Krames, and M. Strassburg |
| Conference Name | Light-Emitting Devices, Materials, and Applications XXV |
| Publisher | International Society for Optics and Photonics |
| Keywords | AlGaInP, Atomic layer deposition, III-nitride, micro-light-emitting diodes, size-independent efficiency |
| URL | https://doi.org/10.1117/12.2579033 |
| DOI | 10.1117/12.2579033 |
