High efficiency of III-nitride and AlGaInP micro-light-emitting diodes using atomic layer deposition

TitleHigh efficiency of III-nitride and AlGaInP micro-light-emitting diodes using atomic layer deposition
Publication TypeConference Paper
Year of Publication2021
AuthorsWong, M. S., J. S. Speck, S. Nakamura, and S. P. DenBaars
EditorKim, J. Kyu, M. R. Krames, and M. Strassburg
Conference NameLight-Emitting Devices, Materials, and Applications XXV
PublisherInternational Society for Optics and Photonics
KeywordsAlGaInP, Atomic layer deposition, III-nitride, micro-light-emitting diodes, size-independent efficiency
URLhttps://doi.org/10.1117/12.2579033
DOI10.1117/12.2579033