Title | Crystal growth on (110) β-Ga2O3 via plasma-assisted molecular beam epitaxy |
Publication Type | Conference Paper |
Year of Publication | 2021 |
Authors | Itoh, T., A. Mauze, Y. Zhang, and J. S. Speck |
Editor | Rogers, D. J., D. C. Look, and F. H. Teherani |
Conference Name | Oxide-based Materials and Devices XII |
Publisher | International Society for Optics and Photonics |
Keywords | Epitaxial growth, Ga2O3, homoepitaxy, Molecular beam epitaxy |
URL | https://doi.org/10.1117/12.2591469 |
DOI | 10.1117/12.2591469 |