Crystal growth on (110) β-Ga2O3 via plasma-assisted molecular beam epitaxy

TitleCrystal growth on (110) β-Ga2O3 via plasma-assisted molecular beam epitaxy
Publication TypeConference Paper
Year of Publication2021
AuthorsItoh, T., A. Mauze, Y. Zhang, and J. S. Speck
EditorRogers, D. J., D. C. Look, and F. H. Teherani
Conference NameOxide-based Materials and Devices XII
PublisherInternational Society for Optics and Photonics
KeywordsEpitaxial growth, Ga2O3, homoepitaxy, Molecular beam epitaxy
URLhttps://doi.org/10.1117/12.2591469
DOI10.1117/12.2591469