BBr3 as a boron source in plasma-assisted molecular beam epitaxy

TitleBBr3 as a boron source in plasma-assisted molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2019
AuthorsCramer, R. C., J. English, B. Bonef, and J. S. Speck
JournalJournal of Vacuum Science & Technology A
Volume37
Pagination061502
URLhttps://doi.org/10.1116/1.5117240
DOI10.1116/1.5117240