Title | BBr3 as a boron source in plasma-assisted molecular beam epitaxy |
Publication Type | Journal Article |
Year of Publication | 2019 |
Authors | Cramer, R. C., J. English, B. Bonef, and J. S. Speck |
Journal | Journal of Vacuum Science & Technology A |
Volume | 37 |
Pagination | 061502 |
URL | https://doi.org/10.1116/1.5117240 |
DOI | 10.1116/1.5117240 |