Title | Electrical properties and interface abruptness of AlSiO gate dielectric grown on 0001 ¯ N-polar and (0001) Ga-polar GaN |
Publication Type | Journal Article |
Year of Publication | 2019 |
Authors | Sayed, I., B. Bonef, W. Liu, S. Chan, J. Georgieva, J. S. Speck, S. Keller, and U. K. Mishra |
Journal | Applied Physics Letters |
Volume | 115 |
Pagination | 172104 |
URL | https://doi.org/10.1063/1.5125788 |
DOI | 10.1063/1.5125788 |