Electrical properties and interface abruptness of AlSiO gate dielectric grown on 0001 ¯ N-polar and (0001) Ga-polar GaN

TitleElectrical properties and interface abruptness of AlSiO gate dielectric grown on 0001 ¯ N-polar and (0001) Ga-polar GaN
Publication TypeJournal Article
Year of Publication2019
AuthorsSayed, I., B. Bonef, W. Liu, S. Chan, J. Georgieva, J. S. Speck, S. Keller, and U. K. Mishra
JournalApplied Physics Letters
Volume115
Pagination172104
URLhttps://doi.org/10.1063/1.5125788
DOI10.1063/1.5125788