| Title | Reduced dislocation density and residual tension in AlN grown on SiC by metalorganic chemical vapor deposition |
| Publication Type | Journal Article |
| Year of Publication | 2019 |
| Authors | Zollner, C. J., A. Almogbel, Y. Yao, B. K. SaifAddin, F. Wu, M. Iza, S. P. DenBaars, J. S. Speck, and S. Nakamura |
| Journal | Applied Physics Letters |
| Volume | 115 |
| Pagination | 161101 |
| URL | https://doi.org/10.1063/1.5123623 |
| DOI | 10.1063/1.5123623 |