Title | Reduced dislocation density and residual tension in AlN grown on SiC by metalorganic chemical vapor deposition |
Publication Type | Journal Article |
Year of Publication | 2019 |
Authors | Zollner, C. J., A. Almogbel, Y. Yao, B. K. SaifAddin, F. Wu, M. Iza, S. P. DenBaars, J. S. Speck, and S. Nakamura |
Journal | Applied Physics Letters |
Volume | 115 |
Pagination | 161101 |
URL | https://doi.org/10.1063/1.5123623 |
DOI | 10.1063/1.5123623 |