| Title | Anisotropic etching of β-Ga2O3 using hot phosphoric acid |
| Publication Type | Journal Article |
| Year of Publication | 2019 |
| Authors | Zhang, Y., A. Mauze, and J. S. Speck |
| Journal | Applied Physics Letters |
| Volume | 115 |
| Pagination | 013501 |
| URL | https://doi.org/10.1063/1.5093188 |
| DOI | 10.1063/1.5093188 |