Efficient tunnel junction contacts for high-power semipolar III-nitride edge-emitting laser diodes

TitleEfficient tunnel junction contacts for high-power semipolar III-nitride edge-emitting laser diodes
Publication TypeJournal Article
Year of Publication2019
AuthorsHamdy, K. W., E. C. Young, A. I. Alhassan, D. L. Becerra, S. P. DenBaars, J. S. Speck, and S. Nakamura
JournalOpt. Express
Volume27
Pagination8327–8334
Date PublishedMar
KeywordsDiode lasers, Electric fields, High power diode lasers, Laser displays, Mass spectrometry, Optical absorption
Abstract

We demonstrate high-power edge-emitting laser diodes (LDs) with tunnel junction contacts grown by molecular beam epitaxy (MBE). Under pulsed conditions, lower threshold current densities were observed from LDs with MBE-grown tunnel junctions than from similarly fabricated control LDs with ITO contacts. LDs with tunnel junction contacts grown by metal-organic chemical vapor deposition (MOCVD) were additionally demonstrated. These LDs were fabricated using a p-GaN activation scheme utilizing lateral diffusion of hydrogen through the LD ridge sidewalls. Secondary ion mass spectroscopy measurements of the \[Si\] and \[Mg\] profiles in the MBE-grown and MOCVD-grown tunnel junctions were conducted to further investigate the results.

URLhttp://www.opticsexpress.org/abstract.cfm?URI=oe-27-6-8327
DOI10.1364/OE.27.008327