Ion implanted AlGaN-GaN HEMTs with nonalloyed ohmic contacts

TitleIon implanted AlGaN-GaN HEMTs with nonalloyed ohmic contacts
Publication TypeJournal Article
Year of Publication2005
AuthorsYu, H., L. McCarthy, S. Rajan, S. Keller, S. DenBaars, J. Speck, and U. Mishra
JournalIEEE electron device letters
Volume26
Pagination283–285