| Title | Atom probe characterization of an AlN interlayer within HEMT structures grown by molecular beam epitaxy and metal-organic chemical vapor deposition |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Mazumder, B., S. W. Kaun, J. Lu, S. Keller, U. K. Mishra, and J. S. Speck |
| Journal | Bulletin of the American Physical Society |
| Volume | 58 |