| Title | Etching of Ga-face and N-face GaN by inductively coupled plasma |
| Publication Type | Journal Article |
| Year of Publication | 2006 |
| Authors | Waki, I., M. Iza, J. S. Speck, S. P. DenBaars, and S. Nakamura |
| Journal | Japanese journal of applied physics |
| Volume | 45 |
| Pagination | 720 |