Title | Atom probe analysis of AlN interlayers in AlGaN/AlN/GaN heterostructures |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | Mazumder, B., S. W. Kaun, J. Lu, S. Keller, U. K. Mishra, and J. S. Speck |
Journal | Applied Physics Letters |
Volume | 102 |
Pagination | 111603 |