Atom probe analysis of AlN interlayers in AlGaN/AlN/GaN heterostructures

TitleAtom probe analysis of AlN interlayers in AlGaN/AlN/GaN heterostructures
Publication TypeJournal Article
Year of Publication2013
AuthorsMazumder, B., S. W. Kaun, J. Lu, S. Keller, U. K. Mishra, and J. S. Speck
JournalApplied Physics Letters
Volume102
Pagination111603