Impact of $$\backslash$hbox ${$CF$}$ _ ${$4$}$ $ Plasma Treatment on GaN

TitleImpact of $$\backslash$hbox ${$CF$}$ _ ${$4$}$ $ Plasma Treatment on GaN
Publication TypeJournal Article
Year of Publication2007
AuthorsChu, R., C. Soo Suh, M. Hoi Wong, N. Fichtenbaum, D. Brown, L. McCarthy, S. Keller, F. Wu, J. S. Speck, and U. K. Mishra
JournalIEEE Electron Device Letters
Volume28
Pagination781–783