Growth of nitrogen-doped (010) β-Ga2O3 by plasma-assisted molecular beam epitaxy using an O2/N2 gas mixture

TitleGrowth of nitrogen-doped (010) β-Ga2O3 by plasma-assisted molecular beam epitaxy using an O2/N2 gas mixture
Publication TypeJournal Article
Year of Publication2025
AuthorsRebollo, S., Y. Liu, C. Peterson, S. Krishnamoorthy, and J. S. Speck
JournalApplied Physics Letters
Volume126