| Title | Heated-H3PO4 etching of (001) Beta-Ga2O3 |
| Publication Type | Journal Article |
| Year of Publication | 2024 |
| Authors | Rebollo, S., T. Itoh, S. Krishnamoorthy, and J. S. Speck |
| Journal | Applied Physics Letters |
| Volume | 125 |
| Issue | 1 |
| Date Published | 07/2024 |
| Title | Heated-H3PO4 etching of (001) Beta-Ga2O3 |
| Publication Type | Journal Article |
| Year of Publication | 2024 |
| Authors | Rebollo, S., T. Itoh, S. Krishnamoorthy, and J. S. Speck |
| Journal | Applied Physics Letters |
| Volume | 125 |
| Issue | 1 |
| Date Published | 07/2024 |