Vertical PtOx/Pt/Beta-Ga2O3 Schottky diodes with high permittivity dielectric field plate for low leakage and high breakdown voltage

TitleVertical PtOx/Pt/Beta-Ga2O3 Schottky diodes with high permittivity dielectric field plate for low leakage and high breakdown voltage
Publication TypeJournal Article
Year of Publication2023
AuthorsFarzana, E., S. Roy, N. S. Hendricks, S. Krishnamoorthy, and J. S. Speck
JournalApplied Physics Letters
Volume123
Issue19