| Title | Sn doping of [beta]-Ga2O3 grown by plasma-assisted molecular beam epitaxy |
| Publication Type | Conference Paper |
| Year of Publication | 2021 |
| Authors | Mauze, A., T. Itoh, Y. Zhang, and J. S. Speck |
| Editor | Rogers, D. J., D. C. Look, and F. H. Teherani |
| Conference Name | Oxide-based Materials and Devices XII |
| Publisher | International Society for Optics and Photonics |
| Keywords | doping, gallium oxide, Molecular beam epitaxy, thin films, ultra wide bandgap |
| URL | https://doi.org/10.1117/12.2593236 |
| DOI | 10.1117/12.2593236 |