| Title | Materials progress for the development of beta-Ga2O3 for power electronics |
| Publication Type | Conference Paper |
| Year of Publication | 2021 |
| Authors | Speck, J. S. |
| Editor | Rogers, D. J., D. C. Look, and F. H. Teherani |
| Conference Name | Oxide-based Materials and Devices XII |
| Publisher | International Society for Optics and Photonics |
| Keywords | doping, Etching, Ga2O3, Power electronics, Schottky Diodes |
| URL | https://doi.org/10.1117/12.2591435 |
| DOI | 10.1117/12.2591435 |