Title | Microstructural and Optical Evaluation of Nitride Light-Emitting Diodes and II–VI Distributed Bragg Reflectors Combined by Direct Wafer Bonding |
Publication Type | Journal Article |
Year of Publication | 2005 |
Authors | Murai, A., C. Kruse, K. Samonji, L. McCarthy, J. S. Speck, U. K. Mishra, S. P. DenBaars, and D. Hommel |
Journal | Japanese Journal of Applied Physics |
Volume | 44 |
Pagination | L958 |
Abstract | We report on the structural and optical characteristics of InGaN/GaN light-emitting diodes (LEDs) and n -type ZnSe-based II–VI distributed Bragg reflectors combined by direct wafer bonding. Reflectivity and transmission electron microscopy (TEM) measurements were performed. The bonded sample exhibited a higher reflectivity at the wavelength of 510 nm than a control LED with an Al cap. Samples were bonded at 270°C for 60 min or at 650°C for 5 min. Cross-sectional TEM revealed a uniform wafer-bonded interface with no voids or cavities for the low temperature sample, while the sample bonded at a higher temperature was observed to have lens-shaped cavities at semiconductor interfaces. |
URL | http://stacks.iop.org/1347-4065/44/i=7L/a=L958 |