Microstructural and Optical Evaluation of Nitride Light-Emitting Diodes and II–VI Distributed Bragg Reflectors Combined by Direct Wafer Bonding

TitleMicrostructural and Optical Evaluation of Nitride Light-Emitting Diodes and II–VI Distributed Bragg Reflectors Combined by Direct Wafer Bonding
Publication TypeJournal Article
Year of Publication2005
AuthorsMurai, A., C. Kruse, K. Samonji, L. McCarthy, J. S. Speck, U. K. Mishra, S. P. DenBaars, and D. Hommel
JournalJapanese Journal of Applied Physics
Volume44
PaginationL958
Abstract

We report on the structural and optical characteristics of InGaN/GaN light-emitting diodes (LEDs) and n -type ZnSe-based II–VI distributed Bragg reflectors combined by direct wafer bonding. Reflectivity and transmission electron microscopy (TEM) measurements were performed. The bonded sample exhibited a higher reflectivity at the wavelength of 510 nm than a control LED with an Al cap. Samples were bonded at 270°C for 60 min or at 650°C for 5 min. Cross-sectional TEM revealed a uniform wafer-bonded interface with no voids or cavities for the low temperature sample, while the sample bonded at a higher temperature was observed to have lens-shaped cavities at semiconductor interfaces.

URLhttp://stacks.iop.org/1347-4065/44/i=7L/a=L958