| Title | Compound Semiconductor Devices-Impact of CF4 Plasma Treatment on GaN |
| Publication Type | Journal Article |
| Year of Publication | 2007 |
| Authors | Chu, R., CS. Suh, MH. Wong, N. Fichtenbaum, D. Brown, L. McCarthy, S. Keller, F. Wu, JS. Speck, and UK. Mishra |
| Journal | IEEE Electron Device Letters |
| Volume | 28 |
| Pagination | 781 |