Title | Low threading dislocation density aluminum nitride on silicon carbide through the use of reduced temperature interlayers |
Publication Type | Journal Article |
Year of Publication | 2018 |
Authors | Foronda, H. M., F. Wu, C. Zollner, M. Esmed Alif, B. Saifaddin, A. Almogbel, M. Iza, S. Nakamura, S. P. DenBaars, and J. S. Speck |
Journal | Journal of Crystal Growth |
Volume | 483 |
Pagination | 134–139 |