Low threading dislocation density aluminum nitride on silicon carbide through the use of reduced temperature interlayers

TitleLow threading dislocation density aluminum nitride on silicon carbide through the use of reduced temperature interlayers
Publication TypeJournal Article
Year of Publication2018
AuthorsForonda, H. M., F. Wu, C. Zollner, M. Esmed Alif, B. Saifaddin, A. Almogbel, M. Iza, S. Nakamura, S. P. DenBaars, and J. S. Speck
JournalJournal of Crystal Growth
Volume483
Pagination134–139