| Title | Growth and etching characteristics of (001) β-Ga2O3 by plasma-assisted molecular beam epitaxy |
| Publication Type | Journal Article |
| Year of Publication | 2017 |
| Authors | Oshima, Y., E. Ahmadi, S. Kaun, F. Wu, and J. S. Speck |
| Journal | Semiconductor Science and Technology |
| Volume | 33 |
| Pagination | 015013 |