Impact of Surface Treatment on Interface States of ALD Al2O3/GaN Interfaces

TitleImpact of Surface Treatment on Interface States of ALD Al2O3/GaN Interfaces
Publication TypeJournal Article
Year of Publication2017
AuthorsJackson, C. M., A. R. Arehart, T. J. Grassman, B. McSkimming, J. S. Speck, and S. A. Ringel
JournalECS Journal of Solid State Science and Technology
Volume6
PaginationP489–P494