| Title | Method of controlling stress in group-iii nitride films deposited on substrates |
| Publication Type | Miscellaneous |
| Year of Publication | 2011 |
| Authors | Marchand, H., B. J. Moran, U. K. Mishra, and J. S. Speck |
| Title | Method of controlling stress in group-iii nitride films deposited on substrates |
| Publication Type | Miscellaneous |
| Year of Publication | 2011 |
| Authors | Marchand, H., B. J. Moran, U. K. Mishra, and J. S. Speck |