Smooth and selective photo-electrochemical etching of heavily doped GaN: Si using a mode-locked 355 nm microchip laser

TitleSmooth and selective photo-electrochemical etching of heavily doped GaN: Si using a mode-locked 355 nm microchip laser
Publication TypeJournal Article
Year of Publication2016
AuthorsLee, S., S. Mishkat-Ul-Masabih, J. T. Leonard, D. F. Feezell, D. A. Cohen, J. S. Speck, S. Nakamura, and S. P. DenBaars
JournalApplied Physics Express
Volume10
Pagination011001