Improvement in low energy ion-induced damage with a low temperature GaAs capping layer

TitleImprovement in low energy ion-induced damage with a low temperature GaAs capping layer
Publication TypeJournal Article
Year of Publication1996
AuthorsChen, C-H., E. L. Hu, U. K. Mishra, J. P. Ibbetson, X. Wu, and J. S. Speck
JournalApplied physics letters
Volume69
Pagination1728–1730