Title | Curvature of HVPE c-plane grown GaN wafers in the relation to stress gradients caused by inclined threading dislocations |
Publication Type | Conference Paper |
Year of Publication | 2016 |
Authors | Foronda, H. Miguel, A. E. Romanov, E. C. Young, C. A. Robertson, G. E. Beltz, and J. S. Speck |
Conference Name | Compound Semiconductor Week (CSW)[Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS), 2016 |
Publisher | IEEE |