Title | Improving source efficiency for aluminum nitride grown by metal organic chemical vapor deposition |
Publication Type | Journal Article |
Year of Publication | 2016 |
Authors | Foronda, H. M., M. A. Laurent, B. Yonkee, S. Keller, S. P. DenBaars, and J. S. Speck |
Journal | Semiconductor Science and Technology |
Volume | 31 |
Pagination | 085003 |