Improving source efficiency for aluminum nitride grown by metal organic chemical vapor deposition

TitleImproving source efficiency for aluminum nitride grown by metal organic chemical vapor deposition
Publication TypeJournal Article
Year of Publication2016
AuthorsForonda, H. M., M. A. Laurent, B. Yonkee, S. Keller, S. P. DenBaars, and J. S. Speck
JournalSemiconductor Science and Technology
Volume31
Pagination085003