Composition determination of β-(Al x Ga1- x) 2O3 layers coherently grown on (010) β-Ga2O3 substrates by high-resolution X-ray diffraction

TitleComposition determination of β-(Al x Ga1- x) 2O3 layers coherently grown on (010) β-Ga2O3 substrates by high-resolution X-ray diffraction
Publication TypeJournal Article
Year of Publication2016
AuthorsOshima, Y., E. Ahmadi, S. C. Badescu, F. Wu, and J. S. Speck
JournalApplied Physics Express
Volume9
Pagination061102