| Title | Chlorine-based dry etching of β-Ga2O3 |
| Publication Type | Journal Article |
| Year of Publication | 2016 |
| Authors | Hogan, J. E., S. W. Kaun, E. Ahmadi, Y. Oshima, and J. S. Speck |
| Journal | Semiconductor Science and Technology |
| Volume | 31 |
| Pagination | 065006 |
| Title | Chlorine-based dry etching of β-Ga2O3 |
| Publication Type | Journal Article |
| Year of Publication | 2016 |
| Authors | Hogan, J. E., S. W. Kaun, E. Ahmadi, Y. Oshima, and J. S. Speck |
| Journal | Semiconductor Science and Technology |
| Volume | 31 |
| Pagination | 065006 |