Suppression of inclined defect formation and increase in critical thickness by silicon doping on non-c-plane (Al, Ga, In) N

TitleSuppression of inclined defect formation and increase in critical thickness by silicon doping on non-c-plane (Al, Ga, In) N
Publication TypeMiscellaneous
Year of Publication2014
AuthorsHardy, M. T., P. Shan Hsu, S. P. DenBaars, J. S. Speck, and S. Nakamura