Title | Method of controlling stress in group-III nitride films deposited on substrates |
Publication Type | Miscellaneous |
Year of Publication | 2015 |
Authors | Marchand, H., B. J. Moran, U. K. Mishra, and J. S. Speck |
Title | Method of controlling stress in group-III nitride films deposited on substrates |
Publication Type | Miscellaneous |
Year of Publication | 2015 |
Authors | Marchand, H., B. J. Moran, U. K. Mishra, and J. S. Speck |