Nonalloyed ohmic contacts in AlGaN/GaN HEMTs by ion implantation with reduced activation

TitleNonalloyed ohmic contacts in AlGaN/GaN HEMTs by ion implantation with reduced activation
Publication TypeJournal Article
Year of Publication2006
AuthorsRecht, F., L. McCarthy, S. Rajan, A. Chakraborty, C. Poblenz, A. Corrion, JS. Speck, and UK. Mishra
JournalInfo: Postprints, UC Santa Barbara