Atom Probe Tomography of III-Nitrides Based Semiconducting Devices

TitleAtom Probe Tomography of III-Nitrides Based Semiconducting Devices
Publication TypeJournal Article
Year of Publication2013
AuthorsShivaraman, R., Y-R. Wu, S. Choi, R. Chung, and J. Speck
JournalMicroscopy and Microanalysis
Volume19
Pagination956–957