β-(AlxGa1- x) 2O3/Ga2O3 (010) heterostructures grown on β-Ga2O3 (010) substrates by plasma-assisted molecular beam epitaxy

Titleβ-(AlxGa1- x) 2O3/Ga2O3 (010) heterostructures grown on β-Ga2O3 (010) substrates by plasma-assisted molecular beam epitaxy
Publication TypeJournal Article
Year of Publication2015
AuthorsKaun, S. W., F. Wu, and J. S. Speck
JournalJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume33
Pagination041508