Method of improving surface morphology of (Ga, Al, In, B) N thin films and devices grown on nonpolar or semipolar (Ga, Al, In, B) N substrates

TitleMethod of improving surface morphology of (Ga, Al, In, B) N thin films and devices grown on nonpolar or semipolar (Ga, Al, In, B) N substrates
Publication TypeMiscellaneous
Year of Publication2014
AuthorsFarrell, R. M., M. Iza, J. S. Speck, S. P. DenBaars, and S. Nakamura