3D Characterization Study of High-k Dielectric on GaN Using Atom Probe Tomography

Title3D Characterization Study of High-k Dielectric on GaN Using Atom Probe Tomography
Publication TypeJournal Article
Year of Publication2013
AuthorsMazumder, B., X. Liu, UK. Mishra, and JS. Speck
JournalMicroscopy and Microanalysis
Volume19
Pagination1026–1027