Title | 3D Characterization Study of High-k Dielectric on GaN Using Atom Probe Tomography |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | Mazumder, B., X. Liu, UK. Mishra, and JS. Speck |
Journal | Microscopy and Microanalysis |
Volume | 19 |
Pagination | 1026–1027 |