Title | SELECTIVE DRY ETCHING OF N-FACE (Al, In, Ga) N HETEROSTRUCTURES |
Publication Type | Miscellaneous |
Year of Publication | 2013 |
Authors | Speck, J. S., E. L. Hu, C. C. A. Weisbuch, Y. Seok Choi, G. Koblmüller, M. Iza, and C. Hurni |
Title | SELECTIVE DRY ETCHING OF N-FACE (Al, In, Ga) N HETEROSTRUCTURES |
Publication Type | Miscellaneous |
Year of Publication | 2013 |
Authors | Speck, J. S., E. L. Hu, C. C. A. Weisbuch, Y. Seok Choi, G. Koblmüller, M. Iza, and C. Hurni |