SELECTIVE DRY ETCHING OF N-FACE (Al, In, Ga) N HETEROSTRUCTURES

TitleSELECTIVE DRY ETCHING OF N-FACE (Al, In, Ga) N HETEROSTRUCTURES
Publication TypeMiscellaneous
Year of Publication2013
AuthorsSpeck, J. S., E. L. Hu, C. C. A. Weisbuch, Y. Seok Choi, G. Koblmüller, M. Iza, and C. Hurni