Si doping effects on the electrical and structural properties of high Al composition AlxGa1- xN films grown by MOCVD

TitleSi doping effects on the electrical and structural properties of high Al composition AlxGa1- xN films grown by MOCVD
Publication TypeJournal Article
Year of Publication2003
AuthorsCantu, P., S. Keller, F. Wu, P. Waltereit, AE. Romanov, UK. Mishra, JS. Speck, and SP. DenBaars
Journalphysica status solidi (c)
Pagination2010–2013